PECVD Plasma Enhanced Chemical Vapor Deposition Coating Machine

Weiyi Vacuum PECVD Plasma Enhanced Chemical Vapor Deposition Coating Equipment *** PE-CVD Structural Features Introduction: 1. The PECVD series vacuum tube-type high-temperature sintering furnace, as shown in the figure, integrates the control system and the furnace chamber into one unit; 2. The furnace lining uses vacuum-formed high-purity alumina lightweight material, with imported high-temperature alloy resistance wires as heating elements; 3. A high-purity quartz tube runs horizontally through the center of the furnace body as the chamber, with both ends sealed by stainless steel flanges. Workpieces are heated inside the tube, and the heating elements are arranged parallel to the furnace tube, evenly distributed outside, effectively ensuring temperature uniformity; 4. Temperature measurement employs stable, long-life "K"-type thermocouples to enhance temperature control accuracy; 5. It is specially designed for universities, research institutes, and industrial enterprises to sinter, melt, and analyze metals, non-metals, and other compound materials under atmosphere or vacuum conditions; 6. The MPECVD series vacuum tube furnace features rapid startup, fast heating and cooling, facilitating the loading, firing, and observation of special materials; 7. The furnace control panel is equipped with a touch screen, power switch controls, and power and insurance indicators for real-time monitoring of the system's operational status.